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Methods for Thickness Determination of SiC Homoepilayers by Using Infrared Reflectance Spectroscopy
  • 期刊名称：CHINESE PHYSICS LETTERS
  • 时间：0
  • 页码：068103-1-068103-4
  • 语言：中文
  • 相关项目：碳化硅金属-半导体双极型晶体管的研究
作者： 张玉明|
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