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Active layer self-protection process for organic field-effect transistors
  • 期刊名称：Chinese Journal of Semiconductors
  • 时间：0
  • 页码：410-414
  • 语言：中文
  • 分类：TN386[电子电信—物理电子学] TN321.5[电子电信—物理电子学]
  • 作者机构：[1]Laboratory of Nanofabrication and Novel Device Integration, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 相关基金：Project supported by the State Key Development Program for Basic Research of China （No. 2006CB806204） and the National Natural Science Foundation of China （Nos. 60676001, 60676008）.
  • 相关项目：基于Top-down的分子存储器的加工工艺研究
作者： Liu Ge|Wang Hong|Tu Deyu|Liu Xinghua|Liu Ming|Shang Liwei|Liu Jiang|
关键词： 场效应晶体管, 有源层, 自我保护, 真空沉积, 电气特性, 双层结构, 有害气体, 活性层, OFET, pentacene, CuPc, stability
中文摘要：

Corresponding author. Email： liuming@ime.ac.cn

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