中文摘要：

本文提出并初步实现一种提高等离子显示面板（PDP）出光率的多层干涉型反射膜，其中高折射率材料采用金属诱导多晶硅，低折射率材料采用二氧化硅，并通过实验得到了可见光波段平均反射率为80％的平面高反膜。实验中采用半圆管替代实际PDP中的障壁结构，并且通过蒙特卡罗方法分析了粒子在磁控溅射中沉积到半圆管壁上的过程，得到了薄膜在样片不同圆心角处的厚度分布。模拟实验表明改善膜厚均匀性的主要途径是提高溅射气压。通过简易可靠的反射率测试系统，在红光波段对曲面上的薄膜进行了反射率测量，初步证明所提结构和制备方法的可行性。在0．7Pa的气压下，溅射沉积得到的样品的反射率为50％～65％。

英文摘要：

The reflective interference multilayered coatings, with metal-induced poly-silicon and silica as the high and low refractive index materials, respectively, were deposited by magnetron sputtering on glass substrates with flat and/ or curved surfaces to improve the light extraction of a plasma display panel （PDP）. The average reflectance in the visible light range of the coating on flat substrate was measured to be 80 %. The barrier rib in a PDP was experimentally simulat- ed with a semi-cylindrical segment of a tube, and the deposition and spatial thickness distribution of the multilayerec coating was calculated in Monte Carlo simulation. The simulated results show that the sputtering at an optimized pressure resulted in the multi-layers with uniform thickness. The reflectance of the multi-layers on the curved substrate was mea- sured. The preliminary results show that deposited at 0.7 Pa, the reflectance of the coating ranges from 50% to 65%.