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磁控溅射法制备耐冲蚀钛合金复合涂层研究进展
  • ISSN号：1001-4551
  • 期刊名称：《机电工程》
  • 时间：0
  • 分类：TG146[金属学及工艺—金属材料;一般工业技术—材料科学与工程;金属学及工艺—金属学]
  • 作者机构：[1]黑龙江八一农垦大学工程学院,大庆163319, [2]吉林大学工程仿生教育部重点实验室, [3]长春理工大学图书馆
  • 相关基金：国家自然科学基金重点项目（50635030）;国家973计划前期研究专项（2007CB616913）资助;吉林大学研究生创新基金资助项目（20091015）.
作者： 张燕梁[1], 戈超[2], 张俊秋[2], 贾凡[3], 马荣峰[2]
关键词： 磁控溅射, 耐冲蚀, 钛合金, magnetron sputter, erosion resistance, titanium alloy
中文摘要：

介绍了磁控溅射的基本原理，以及几种典型的磁控溅射镀膜技术（反应溅射、非平衡磁控溅射、等离子体加强磁控溅射技术）；并介绍了利用磁控溅射技术制备钛合金耐冲蚀涂层的新进展。

英文摘要：

In this paper,the basic concept of magnetron sputtering method was reviewed and several typical magnetron sputtering technology such as reactive magnetron sputtering,unbalanced magnetron sputtering and plasma enhanced magnetron sputtering was described. Recent progress in research on erosion resistance titanium alloy composite coatings deposited by magnetron sputtering method was summarized.

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期刊信息
  • 《机电工程》
  • 中国科技核心期刊
  • 主管单位:浙江省机电集团有限公司
  • 主办单位:浙江大学 浙江省机电集团有限公司
  • 主编：赵群
  • 地址：浙江省杭州市大学路高官弄9号
  • 邮编：310009
  • 邮箱：meem_contribute@163.com
  • 电话：0571-87239525
  • 国际标准刊号：ISSN：1001-4551
  • 国内统一刊号：ISSN：33-1088/TM
  • 邮发代号:32-68
  • 获奖情况:
  • 《机电工程》杂志是《中文核心期刊要目总览》1997...
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  • 被引量:12715