中文摘要：

在分析和细化MEMS多种器件设计流程的基础上,建立了通用的MEMS Top-Down设计过程模型.参考工作流过程定义语言XPDL,并对其进行了扩展和修改,充分考虑微机械系统设计过程的特点,提出了一种基于XML的MEMS设计过程描述语言（MDPDL）,介绍了其设计和实现的基本思想,用实例验证了该语言的有效性.

英文摘要：

Based on the analysis and details of the design flows of many MEMS devices, a general top-down design process model for MEMS is established. Referring to XPDL of WFMC and taking the characteristics of MEMS design processes into account, an XML-based top-down design process description language for MEMS is proposed, called MDPDL （MEMS design process description language）. It is extended from XML and described with XML DTD. The idea of design and implementation is introduced and a case is given to qualify the validity of MDPDL.