Forward Gated-Diode Method for Extracting Gate Oxide Thickness and Body Doping Concentration
- 所属机构名称:复旦大学
- 会议名称:10th International Conference on Solid-State and Integrated Circuit Technology (ICSICT2010)
- 时间:2010.11.11
- 成果类型:会议
- 相关项目:纳米CMOS器件的可靠性表征技术、失效机理及预测模型研究