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Probing particle movement in CMP with fluorescence technique
  • ISSN号：0013-4651
  • 期刊名称：Journal of the Electrochemical Society
  • 时间：2011
  • 页码：H681-H685
  • 相关项目：微纳制造中的表面/界面行为及控制技术研究
作者： Lei, Jun|Guo, Dan|Luo, Jianbin|Pan, Guoshun|
同期刊论文项目
微纳制造中的表面/界面行为及控制技术研究
期刊论文 85 会议论文 3 获奖 22 专利 63
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