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A flexible nanobrush pad for the chemical mechanical planarization of Cu/ultra-low-kappa materials
  • ISSN号：1931-7573
  • 期刊名称：Nanoscale Research Letters
  • 时间：2012.10.10
  • 页码：-
  • 相关项目：微纳制造中的表面/界面行为及控制技术研究
作者： Han Guiquan|Liu Yuhong|Lu Xinchun|Luo Jianbin|
同期刊论文项目
微纳制造中的表面/界面行为及控制技术研究
期刊论文 85 会议论文 3 获奖 22 专利 63
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