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Numerical and experimental investigation on multi-zone chemical mechanical planarization
  • ISSN号：0167-9317
  • 期刊名称：Microelectronic Engineering
  • 时间：2011
  • 页码：3327-3332
  • 相关项目：微纳制造中的表面/界面行为及控制技术研究
作者： Wang, Tongqing|Lu, Xinchun|
同期刊论文项目
微纳制造中的表面/界面行为及控制技术研究
期刊论文 85 会议论文 3 获奖 22 专利 63
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