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Electrochemical investigation of copper passivation kinetics and its application to low-pressure CMP
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：2013.1.1
  • 页码：764-770
  • 相关项目：微纳制造中的表面/界面行为及控制技术研究
作者： Li Jing|Liu Yuhong|Wang Tongqing|Lu Xinchun|Luo Jianbin|
同期刊论文项目
微纳制造中的表面/界面行为及控制技术研究
期刊论文 85 会议论文 3 获奖 22 专利 63
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