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The Role of Hydroxyethyl Cellulose (HEC) in the Chemical Mechanical Planarization of Copper
  • ISSN号：0013-4651
  • 期刊名称：Journal of the Electrochemical Society
  • 时间：2012
  • 页码：329-334
  • 相关项目：微纳制造中的表面/界面行为及控制技术研究
作者： Pan Yan|Liu Yuhong|Lu Xinchun|Pan Guoshun|Luo Jianbin|
同期刊论文项目
微纳制造中的表面/界面行为及控制技术研究
期刊论文 85 会议论文 3 获奖 22 专利 63
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