中文摘要：

磁控溅射技术可制备超硬膜、耐腐蚀摩擦薄膜、超导薄膜、磁性薄膜、光学薄膜,以及各种具有特殊功能的薄膜,在工业薄膜制备领域的应用非常广泛。本文着重介绍了磁控溅射技术原理、特点、磁控溅射技术的发展史及其发展趋势。

英文摘要：

Magnetron sputtering could be used in deposition of hard,wear-resistant coatings,low friction coatings,corrosion resistant coatings,superconducting coatings,magnetic coatings,optical coatings,and coatings with other special functions.Magnetron sputtering has become widely used to fabricate thin film in industry.The principle and the characteristics of magnetron sputtering technology,as well as the development history and the development trends of magnetron sputtering are introduced in this paper.