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Investigation of Thermal Stability of Atomic-Layer-Deposited MgO Thin Films on Si(100) Using X-Ray P
ISSN号:1099-0062
期刊名称:Electrochemical and Solid State Letters
时间:0
页码:G25-G28
语言:英文
相关项目:原子层淀积高介电常数栅介质的界面层抑制和性能调控
作者:
Ding, Shi-Jin|Lu, Hong-Liang|Zhang, David Wei|
同期刊论文项目
原子层淀积高介电常数栅介质的界面层抑制和性能调控
期刊论文 27
同项目期刊论文
Spectroscopic ellipsometry study of thin NiO films grown on Si (100) by atomic layer deposition
Improvement of Atomic-Layer-Deposited Al2O3/GaAs Interface Property by Sulfuration and NH3 Thermal N
Band Structures of Metal-Oxide Capped Graphene: A First Principles Study
Nonvolatile Metal-Oxide-Semiconductor Capacitors with Ru-RuO (x) Composite Nanodots Embedded in Atom
Ta2O5在Si(100)表面原子层沉积反应机理的密度泛函研究
A novel self-refreshable capacitorless DRAM cell and its extended applications
Investigation on memory effect of MOS capacitors with Al-2 O-3/Pt-nanocrystals/HfO2
Electronic structure and optical properties of Nb doped Al2O3 on Si by atomic layer deposition
Highly Uniform Bipolar Resistive Switching With Al2O3 Buffer Layer in Robust NbAlO-Based RRAM
Atomic-Layer-Deposited HfLaO-Based Resistive Switching Memories With Superior Performance
Effect of pulse-plated nickel barriers on tin whisker growth for pure tin solder joints
Initial reaction mechanism of nitrogen-doped zinc oxide with atomic layer deposition
Atomic Layer Deposition of Al2O3 on H-Passivated GeSi: Initial Surface Reaction Pathways with H/GeSi
Density Functional Theory Study on the Reaction Mechanisms of Bis(cyclopentadienyl)magnesium with Hy
Influence of Ta and TaN bottom electrodes on electrical performances of MIM capacitors with atomic-l
Surface reaction mechanism of Y2O3 atomic layer deposition on the hydroxylated Si(100)-2 x 1: A dens
高介电常数HfO2栅介质的制备及性能
N2和NH3退火对铪铝氧栅介质C-V特性的影响