中文摘要：

为了研究延伸波长In0.83Ga0.17As pin光电二极管的暗电流机制。采用两种不同工艺制备了台面型延伸波长In0.83Ga0.17As pin光电二极管。第一种工艺（M135L-5）是：台面刻蚀后进行快速热退火（RTA）。第二种工艺（M135L-3）是：台面刻蚀前进行快速热退火（RTA）。采用IV测试,周长面积比（P/A）,激活能和暗电流成分拟合方法对器件暗电流机制进行分析。结果显示,在220~300 K之间,M135L-3器件暗电流低于M135L-5器件的,并且具有较低表面漏电流。在-0.01~-0.5 V之间和220~270 K之间,M135L-5器件的暗电流主要是扩散电流。在250~300 K之间,M135L-3器件的暗电流主要是扩散电流,而在-0.01~-0.5 V之间和220~240 K之间,其暗电流主要是产生复合电流和表面复合电流。与此同时,暗电流成分拟合结果也得出一致的结论。研究表明,在降低器件暗电流方面,M135L-3器件优于M135L-5器件,这主要是因为快速热退火降低了器件的体电流。

英文摘要：

In order to study the dark current of the devices, in this paper, the dark current of In0.83Ga0.17 As pi-n photodiodes was analyzed. Extended wavelength In0.83Ga0.17 As p-i-n photodiodes with mesa type configuration were fabricated by two different processes. The first process（device marked M135L-5） was：rapid thermal annealing（RTA） was performed after mesa etching. The second process（device marked M135L-3） was： RTA was performed before mesa etching. Dark current mechanisms for extended wavelength In0.83Ga0.17 As p-i-n photodiodes with different device fabrication processes were studied by means of the current-voltage curves at different temperatures and bias voltages. In contrast to M135L-5, M135L-3 had a lower dark current at the same test temperature from 220 K to 300 K. The ratio of perimeter-to-area（P/A） was used to characterize the perimeter-dependent leakage current and the area-dependent leakage current. The results show that M135L-3 has a lower area-dependent leakage current. Activation energy of devices served as a method to estimate the dark current composition was extracted from current-voltage curves. The results indicate that the dark current of M135L-5 is dominated by diffusion current at reverse 0.01-0.5 V bias voltage and at 220-270 K. The dark current of M135L-3 is dominated by diffusion current at 250-300 K as well as dominated by generation recombination current and surface recombination current at reverse 0.01-0.5 V bias voltage and at 220-240 K. Meanwhile, the results of dark current fitting also show the same conclusions. The studies have shown that M135L-3 with annealing treatment and optimization process is better than M135L-5 for reducing dark current because the RTA decrease the bulk dark current.