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全息光刻和二次显影法制备柱形二维光子晶体
  • ISSN号：1001-9014
  • 期刊名称：《红外与毫米波学报》
  • 时间：0
  • 分类：TN2[电子电信—物理电子学]
  • 作者机构：[1]中国科学院上海微系统与信息技术研究所信息功能材料国家重点实验室,上海200050
  • 相关基金：Foundation items： Supported by the National Basic Research Program of China under grant No. 2012CB619200, the National Natural Science Founda- tion of China under grant No. 61275113 and 61204133
作者： 曹远迎[1], 张永刚[1], 李耀耀[1], 顾溢[1], 李爱珍[1], 李好斯白音[1]
关键词： 全息光刻, 二维光子晶体, 柱形, 二次显影, holographic lithography, two dimensional photonic crystals, column shape, double developments
中文摘要：

采用全息光刻和二次显影的方法制备了柱形二维光子晶体.在此过程中,二维点状的周期结构首先在正性光刻胶上直接形成,然后经由Si3N4硬掩模转移到衬底材料上.利用二次显影的方法,曝光强度最强和曝光强度中等区域的光刻胶能够被同时充分显影,而曝光强度最弱区域的光刻胶则可以完全被保留下来.通过调节入射角,可以方便地调节二维结构的周期.利用此方法,在相对较大的面积上制备了不同周期的二维结构,二维结构具有很好的均匀性和重复性.文章对有关的工艺参数进行了详细讨论.

英文摘要：

A simple and cost effective method to fabricate column shape two dimensional photonic crystals by holographic li- thography technique using double development has been reported. In the process two dimensional big-dot-type periodic structures have been generated directly on positive photoresist, and then transferred to the substrate through the Si3N4 hard mask. By using double development, the photoresist exposed to high and medium intensity can be developed away effective- ly, while those exposed to low intensity can still be preserved. The period of the two dimensional structures can be easily controlled by adjusting the angle of two incident beams. The structures in a large period range over a relative large area have been generated with good uniformity and reproducibility. The processing parameters are discussed in detail.

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期刊信息
  • 《红外与毫米波学报》
  • 中国科技核心期刊
  • 主管单位:中国科学院
  • 主办单位:中国科学院上海技术物理研究所 中国光学学会
  • 主编：褚君浩
  • 地址：上海市玉田路500号
  • 邮编：200083
  • 邮箱：jimw@mail.sitp.ac.cn
  • 电话：021-25051553
  • 国际标准刊号：ISSN：1001-9014
  • 国内统一刊号：ISSN：31-1577/TN
  • 邮发代号:4-335
  • 获奖情况:
  • 1992、1996年获全国优秀学术期刊一等奖,1999年首届国家期刊奖
  • 国内外数据库收录:
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  • 被引量:8778