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中文摘要：
为了研究磷酸对AlN陶瓷烧结的影响,利用磷酸对AlN粉末进行酸洗处理制备了具有较高抗水解能力的AlN粉末,在碳管炉氮气气氛下进行陶瓷烧结;利用XRD和SEM对AlN陶瓷进行了表征,并进行了密度的测定。结果表明磷酸酸洗降低了AlN的含氧量,优化了粉末烧结性能,有利于AlN陶瓷的致密化。经过磷酸酸洗的粉末在1800℃下烧结,陶瓷样品微观结构良好,相对密度为98.8%,且没有新杂质相形成。
英文摘要：
Protection of AlN powder against hydrolysis using phosphoric acid pickling,sintering ceramics by vacuum carbon tube furnace in N2 for researching the Effects of phosphoric acid on the sintering behavior of AlN.The characterization of the sinter was determined by XRD and SEM,and the density of AlN was measured.The results show that phosphoric acid make the oxygen content of aluminum nitride decrease,and promote the densification of AlN ceramics.AlN ceramics sintered at 1800℃ by picked powders is densely compacted with uniform microstructures.Relative density is as high as 97.8%.And no new phase is generated by phosphoric acid pickling.
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