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In situ aberration measurement technique based on principal component analysis of aerial image
  • ISSN号：1094-4087
  • 期刊名称：Optics Express
  • 时间：2011
  • 页码：18080-18090
  • 相关项目：超大数值孔径光刻成像与图形保真技术研究
作者： Duan, Lifeng|Wang, Xiangzhao|Bourov, Anatoly Y.|Peng, Bo|Bu, Peng|
同期刊论文项目
超大数值孔径光刻成像与图形保真技术研究
期刊论文 70 会议论文 20 专利 75
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