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Optimal 3D phase-shifting masks in partially coherent illumination
  • ISSN号：0003-6935
  • 期刊名称：Applied Optics
  • 时间：2011.10.10
  • 页码：5567-5576
  • 相关项目：超大数值孔径光刻成像与图形保真技术研究
作者： Ma, Xu|Arce, Gonzalo R.|Li, Yanqiu|
同期刊论文项目
超大数值孔径光刻成像与图形保真技术研究
期刊论文 70 会议论文 20 专利 75
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