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Calibration method to characterize the accuracy of phase-shifting point diffraction interferometer
  • ISSN号：0034-6748
  • 期刊名称：Review of Scientific Instruments
  • 时间：2011.3.3
  • 页码：033105-
  • 相关项目：超大数值孔径光刻成像与图形保真技术研究
作者： Liu, Ke|Li, Yanqiu|Wang, Hai|
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超大数值孔径光刻成像与图形保真技术研究
期刊论文 70 会议论文 20 专利 75
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