研究了合成工艺、烧结工艺、烧银工艺及极化工艺对PMSZT压电陶瓷相组成、显微结构及电性能的影响。结果表明,PZT压电陶瓷在合成温度为900℃时,可得钙钛矿结构;烧结温度1240℃时,体积密度最大,综合性能达最佳。烧银温度对陶瓷性能有一定影响。随着烧银温度的升高,介电常数、介电损耗、压电常数和机电耦和系数降低。最佳极化工艺为极化温度120℃,极化电压2500V/mm。
The influence of calcinating, sintering, Ag-coated, polarizing technique on the crystallographicphase,microstructure and electric-properties have been studied. The results showed that pure perovskitic structure was obtained at calcination of 900 ℃. The maximum density and excellent electro-properties appeared at 1 240℃. With Ag-coated temperature increasing, the dielectric constant, dielectric loss, piezoelectric constant and electromechanical coupling factor decrease, The value of polarization intensity with 2 500 V/ram and polarization temperature with 120 ℃ are the optimum polarizing technique in the PMSZT system.