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中文摘要：
针对近年出现的新概念光学读出双材料微梁阵列红外成像技术,提出了具有热变形放大效果的无硅基底回折腿间隔镀金的微梁单元结构,并建立了其热机械模型,在模型分析基础上,成功的设计制作了100×100像素的焦平面阵列（focal plane array,FPA）.在构建的红外成像系统中,实现了对室温物体——人体的热成像,噪声等效温度差约为200mK.实验结果与热机械模型的分析一致.
英文摘要：
The uncooled IR thermal imaging technology with its wide applications in military, medical and industrial areas has been an active topic in international research. Thermal imaging based on optical readout bi-material microcantilever array is a new concept in methodology. In this paper, a new kind of bi-material micro-cantilever unit with multi-fold legs and interval gild structure is designed and its thermal and thermo-mechanical performance are analylized. A 100 × 100 microcantilever array is fabricated as a FPA （focal plane array）, and by using this FPA, a thermal image of a room-temperature body （human body） is successfully detected. The NETD （ noise-equivalent temperature difference） is about 200mK. The experimental results are well accordant with the thermal analysis of the microcantilever unit.
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