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Deterministic ion beam material adding technology for high-precision optical surfaces
  • ISSN号：0003-6935
  • 期刊名称：Applied Optics
  • 时间：2013.2.18
  • 页码：1302-1309
  • 相关项目：光刻物镜光学零件纳米精度制造基础研究
作者： 廖文林|戴一帆|解旭辉|周林|
同期刊论文项目
光刻物镜光学零件纳米精度制造基础研究
期刊论文 46 会议论文 7 获奖 4 著作 1
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