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Ion beam processing for ultra-smooth glass-ceramic optics
  • 期刊名称：SPIE Newsroom
  • 时间：2014
  • 页码：005693-
  • 相关项目：光刻物镜光学零件纳米精度制造基础研究
作者： 廖文林|解旭辉|戴一帆|
同期刊论文项目
光刻物镜光学零件纳米精度制造基础研究
期刊论文 46 会议论文 7 获奖 4 著作 1
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