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Three-dimensional surface error reconstruction and ion beam figuring of optical hemisphere
ISSN号:1022-6680
期刊名称:Advanced Materials Research
时间:2012
页码:210-214
相关项目:光刻物镜光学零件纳米精度制造基础研究
作者:
廖文林|戴一帆|解旭辉|周林|
同期刊论文项目
光刻物镜光学零件纳米精度制造基础研究
期刊论文 46
会议论文 7
获奖 4
著作 1
同项目期刊论文
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