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Control of Thermal Effect in Ion Beam Figuring Process Based on Low-Pass Filtering
  • 期刊名称：Applied Mechatronics and Materials
  • 时间：2011
  • 页码：360-365
  • 相关项目：光刻物镜光学零件纳米精度制造基础研究
作者： 袁征|戴一帆|于皓|
同期刊论文项目
光刻物镜光学零件纳米精度制造基础研究
期刊论文 46 会议论文 7 获奖 4 著作 1
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