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离子束修形技术
  • ISSN号：1002-2082
  • 期刊名称：应用光学
  • 时间：2011
  • 页码：753-760+805
  • 分类：TN205[电子电信—物理电子学] TG580.692[金属学及工艺—金属切削加工及机床]
  • 作者机构：[1]国防科技大学机电工程与自动化工程学院,湖南长沙410073
  • 相关基金：国家自然科学基金（91023042 50775215 50975281）
  • 相关项目：光刻物镜光学零件纳米精度制造基础研究
作者： 戴一帆|周林|解旭辉|廖文林|沈永祥|
关键词： 离子束修形, 抛光, 驻留时间, 光学加工, ion beam figuring, polishing, dwell time, optical processing
中文摘要：

离子束修形技术具有精度高、确定性好等优点,应用越来越广泛。介绍了离子束修形技术的原理和特点,以及国外离子束修形技术的发展历程和现状,并介绍了国内离子束修形技术的发展现状。针对当前离子束修形技术的研究热点,如中高频误差控制技术、驻留时间求解算法和加工工艺等方面,综述了国内外的研究现状。

英文摘要：

The ion beam figuring（IBF） technology is widely used for precision and deterministic process.This paper introduced the principles and characteristics of IBF,described its development status at home and abroad,summarized the research focus of IBF such as the technology to control the mid-high spatial frequency error,the algorithm to solve dwell time,and the processing technique.

同期刊论文项目
光刻物镜光学零件纳米精度制造基础研究
期刊论文 46 会议论文 7 获奖 4 著作 1
基于分区域拼接加工的小型超半球面纳米精度制造理论与方法
期刊论文 7 会议论文 3 专利 3
精密光学制造的中高频误差分析与控制
期刊论文 31 会议论文 2 专利 9
同项目期刊论文
<span style="font-size:10.5pt;font-family:&quot;">Mathematical modeling and appl
<span style="font-size:10.5pt;font-family:;">Nanopatterning of optical surfaces duri
Machining Model of Position-attitude in Magnetorheological Finishing (MRF) of High-precision Off-axi
Material removal mechanism of ceria particles with different sizes in glass polishing
Surface evaluation and evolution during hydrodynamic effect polishing for quartz glass
Magnetorheological finishing of low-gradient curved surfaces based on four-axis linkage technique
Ion beam processing for ultra-smooth glass-ceramic optics
基于离子束抛光的KDP晶体表面嵌入铁粉清洗研究
Control of Thermal Effect in Ion Beam Figuring Process Based on Low-Pass Filtering
<span style="font-size:10.5pt;font-family:;">Mathematical modeling and application o
光学元件离子束修形去除效率分析
离子束作用下KDP晶体表面粗糙度研究
氟化钙单晶超精密抛光技术
Deterministic ion beam material adding technology for high-precision optical surfaces
Research on error control and compensation in magnetorheological finishing
Morphology evolution of fused silica surface during ion beam figuring of high-slope optical componen
Corrective capability analysis and machining error control in ion beam figuring of high-precision op
Combined figuring technology for high-precision optical surfaces using deterministic ion beam materi
离子束修形中光学元件表面热量沉积数值模拟
离子束倾斜入射抛光对表面粗糙度的影响
<span style="font-size:10.5pt;font-family:" background:white;"="">Eff
<span style="font-size:10.5pt;font-family:;">Influence of local densification on mic
Influence law of structural characteristics on the surface roughness of a magnetorheological-finishe
Numerical simulation on the thermal deposition of optical surface irradiated by low energy ion beam
光刻物镜光学零件制造关键技术概述
Three-dimensional surface error reconstruction and ion beam figuring of optical hemisphere
Microscopic morphology evolution during ion beam smoothing of Zerodur surfaces
Ion Beam Figuring System for Ultra-precise Optics
<span style="font-size:10.5pt;font-family:;">Influence of material removal programmi
Research on reducing the edge effect in magnetorheological finishing
Magnetorheological finishing of low-gradient curved surfaces based on four-axis linkage technique
离子束作用下的光学表面粗糙度演变研究
Self-calibrated subaperture stitching test of hyper hemispheres using latitude and longitude coordin
离子束抛光加工矩形离轴非球面镜
Ion beam figuring of high slope surfaces based on surface figure error compensation algorithm
光学镜面磁流变抛光的后置处理
Calibration and prediction of removal function in magnetorheological finishing
Post processing for magnetorheological finishing of optical mirrors
Optimum removal in ion-beam figuring
Restraint of tool path ripple based on surface error distribution and process parameters in determin
Deterministic figuring in optical machining by magnetorheological finishing
Influence of the fabrication error in IBF on the scattering loss
A novel path used in computer-controlled polishing process based on uniform-area-increment spiral
Research on process optimization of magnetorheological finishing basing on predictive model of remov
Influence of mid-and-high frequency errors in optical processing on fractional encircled energy
Magnetorheological finishing for high-precision optical surface
Realization of velocity mode in flat optics machining using ion beam
Algorithm and implementation of magnetorheological finishing with spiral scan mode
Dwell time algorithm based on vector for MRF process of optics
Influence of mid-and-high frequency errors from optical processing on ratio of scattering loss
Frequency-domain analysis of computer-controlled optical surfacing processes
Restraint of mid-spatial frequency error in magneto-rheological finishing (MRF) process by maximum e
Study on the mechanism and arts of magnetorheological finishing (MRF) by nano-sized diamond abrasive
Deterministic figuring in optical machining by ion beam
Experimental research on super-smooth polishing process of typical silicon carbide materials
Polishing parameters of magnetorheological finishing for high-precision optical surfaces
磁流变抛光过程的材料去除三维模型
确定性磁射流抛光技术
光学平面镜面离子束修形中速度模式的实现
磁流变抛光消除磨削亚表面损伤层新工艺
光学加工中高频误差对散射损失比的影响
期刊信息
  • 《应用光学》
  • 中国科技核心期刊
  • 主管单位:中国兵器工业集团公司
  • 主办单位:中国兵工学会 中国兵器工业第二零五研究所
  • 主编：纪明
  • 地址：西安市电子城电子三路西段9号
  • 邮编：710065
  • 邮箱：yygx205@163.com
  • 电话：029-88288172
  • 国际标准刊号：ISSN：1002-2082
  • 国内统一刊号：ISSN：61-1171/O4
  • 邮发代号:52-245
  • 获奖情况:
  • 中国科学引文数据库来源期刊,中国学术期刊综合评价数据库来源期刊
  • 国内外数据库收录:
  • 俄罗斯文摘杂志,美国化学文摘（网络版）,波兰哥白尼索引,荷兰文摘与引文数据库,美国剑桥科学文摘,英国科学文摘数据库,中国中国科技核心期刊,中国北大核心期刊（2008版）,中国北大核心期刊（2011版）,中国北大核心期刊（2014版）
  • 被引量:7309