中文摘要：

为了避免传统加工过程对KDP（Potassium dihydrogen phosphate）晶体表面产生损伤、嵌入杂质等降低晶体抗激光损伤阈值的不利因素,文章探索采用离子束抛光技术实现KDP晶体的加工。本文主要分析了离子束抛光作用下KDP晶体表面粗糙度的演变过程,采用垂直入射和倾斜45°入射两种方式研究KDP晶体表面粗糙度,利用倾斜45°入射的加工方式提高了KDP晶体的表面质量,其表面均方根粗糙度值由初始的3.07 nm减小到了1.95 nm,实验结果验证了离子束抛光加工KDP晶体的可行性。

英文摘要：

In order to avoid surface scratches and impurities of the KDP（Potassium dihydrogen phosphate） crystal generated in the process of traditional machining,which would decrease the laser damage threshold,the research is aiming at realizing the machining of KDP crystal by ion beam figuring technology.The experimental study is mainly carried out to analyze the evolvement of surface roughness on KDP crystal.Surface roughness of KDP crystals were studied by normally incidence and obliquely incidence at 45°.The surface RMS roughness is reduced from 3.07 nm to 1.95 nm by the oblique incidence figuring method with the incidence angle at 45°.Experimental results validate the feasibility of ion beam figuring of KDP crystal.