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中文摘要：
针对多轴、高速和超精密激光干涉测量系统对光电接收器在探测灵敏度、响应带宽和稳定性等方面的特殊需求，提出一种基于远程探测的高带宽激光外差信号探测方法。首先，针对多轴激光干涉测量中多个传统光电接收器热耗散大、严重影响测量精度的问题，设计远程光纤探头，将光接收与光电信号处理部分完全分开，彻底消除光电接收器热耗散对测量系统的影响；其次，针对单光轴光功率微弱、难以探测和稳定性差的问题，设计具有主动温度漂移特点的APD高压反向偏置电源，在提高光电接收器探测灵敏度的同时增强其温度稳定性；设计的光电探测器能够实现远程光耦合传输，耦合效率能达到38％以上，最大探测灵敏度为0．52μw，测量带宽可达17．5MHz，满足多轴、高速超精密激光干涉测量系统对光电接收器的性能需求。
英文摘要：
According to the requirements of the multi-axis, high speed, ultra-precision heterodyne interfer- ometer, a high bandwidth laser heterodyne signal detecting method based on remote detection is proposed in this paper. First, a remote fiber sensor is designed tO reduce the thermal dissipation of the conventional receivers in multi-axis laser heterodyne interferometers. With the remote probe design, the light receiving module is separated from the detection circuits, which can completely eliminate the effect of the receiver heat dissipation. Second, an optical detector APD with temperature compensation for high voltage power supply is designed to solve the problem of difficult detecting of the weak light power in each axis of a multi-axis measurement system. Based on this design, high sensitivity and high stability photoelectric conversion can be achieved. According to the above theory analysis and key technology research, a high sensitivity and high stability remote laser heterodyne interference signal detector is integrated and arre： sponding experiments have been done in the laboratory environment. Experimental results verify that the new photoelectric detector can realize 38 % coupling efficiency and above,0.52μW detection sensitivity, and 17.5 MHz measurement response bandwidth. With the improvement in the above performance, the detector can meet the requirements of the high-speed multi-axis laser heterodyne measuring systems.
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