中文摘要：

采用双阴极等离子溅射技术在TC4合金表面制备了MoSi2和Mo（SiAl）2涂层，并在500℃的空气中进行了不同时间的等温氧化，研究了铝元素对MoSi2涂层抗氧化性能的影响。结果表明：两种涂层均由扩散层和沉积层组成，两者的厚度分别约为8，20μm，涂层致密，并与基体紧密结合；随着氧化时间的延长，Mo（SiAl）2涂层的氧化质量增加缓慢，且明显小于MoSi2涂层的；MoSi2涂层在500℃下氧化5h后表面生成了板条状M003，氧化100h后出现“PEST”现象，涂层表面出现大量裂纹；Mo（SiAl）2涂层氧化30h后，表面生成了A1203、Si02、M003，氧化100h后表面完好且未出现明显的裂纹；铝元素的添加提高了MoSi2涂层的抗氧化性能。

英文摘要：

MoSiz coating and Mo（SiAI）2 coating were prepared on TC4 alloy substrate surface by double cathode glow plasma sputtering technology, and then the coatings were oxidated in air and at 500℃ for different times. The effect of AI element on oxidation resistance of MoSi2 coating was studied. The results show that the coatings was composed of diffuse layer of 8 tin1 thickness and deposition layer of 20μm thickness, and the coatings were compact and combined with the substrate closely. With the increase of oxidation time, the oxidation mass increase of Mo（SiA1）3 coating was slowly, and lower than that of MoSi2 coating. Lath-like MoO3 was obtained on MoSi2 coating surface after it was oxidated at 500 ℃ for 5 h, and the ＂PEST＂ appearing and lots of cracks were found on the coating surface after it was oxidated for 100 h. AlzOa, SiO2 and MnOa were found on Mo（SiA1）2 coating surface after it was oxidated for 30 h, and its surface was fine and no obvious cracks after oxidation for 100 h. Adding A1 element increased the oxidation resistance of MoSi2 coating.