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中文摘要：
面向高速行波电吸收（EA）调制器的需要，设计并制作了基于苯并环丁烯（BCB）聚合物／InP衬底的宽带（0～40GHz）、低损耗微波共面波导传输线。对共面波导结构开展仿真设计，分别对BCB材料厚度、InP衬底导电率和信号电极宽度等关键参数进行了优化。结果表明，当设计的BCB膜厚为4μm、InP衬底导电率小于0．002（Ω·cm）^-1和信号线宽度为84μm时，微波传输性能可达最优。在此基础上，采用电阻率为10^8μΩ·cm的半绝缘（SI）InP衬底、涂覆4μmBCB薄膜，制作出0～40GHz范围内微波损耗小于0．5dB／mm的共面波导传输线。
英文摘要：
A wideband（0-40 GHz）, low loss coplanar wavegmde microwave transmission line based on BCB polymer/InP substrate was designed and fabricated for high speed travelingwave electro-absorption （EA） modulators. Based on the simulation of the structure of coplanar waveguides, the key structure factors including the thickness of BCB films, the conductivity of InP substrate, and the signal electrode width were optimized. The simulation results show that the optimum microwave transmission can he obtained at BCB film thickness of 4 μm, InP conductivity less than 0. 002 （Ωcm）-1 and signal electrode width of 84 μm. Therefore, by using a semi-insulated InP substrate with resistivity of 10^8 Ω cm and a 4 μm thick spin-coated BCB thin film, a coplanar waveguide transmission line was fabricated with microwave loss less than 0.5 dB/mm in 0-40 GHz range.
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