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Composition influence of SiNx gate insulator fabricated by radio frequency (RF) Magnetron sputtering
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：0
  • 页码：5995-5998
  • 语言：英文
  • 相关项目：固态阴极射线发光效率的深层次表征及提高
作者： Su-Ling Zhao|Guang-Cai Yuan|Fu-Jun Zhang|Xu-Rong Xu|Zheng Xu|Na Xu|Xiao-Yun Jia|Qin-Jun Sun|
同期刊论文项目
固态阴极射线发光效率的深层次表征及提高
期刊论文 80
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