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中文摘要：
微结构，光，并且磁性和房间温度光致发光 PL 做 ofMn 的 ZnO 薄电影被学习。化学作文被精力检验散 X 光检查光谱学版本和在 ZnOMn 电影的 Mn 离子的费用状态被 X 光检查 photoelectronic spectrometry XPS 描绘。从样品的 X 光检查衍射 XRD 数据，做的 Mn 不改变 ZnO 薄电影的取向，这能被发现。准备的所有电影有 wurtzite 结构并且主要沿着 c 轴取向成长。谷物尺寸和剩余压力从 XRD 结果被计算。这部电影的光发射度随 ZnO 的锰内容的增加减少。这些电影的房间温度光致发光证明在里面 -- 近的乐队精力 NBE 排放的紧张强烈取决于 Mn 内容。磁滞现象行为显示有在 9at% 下面的 Mn 内容的电影在房间温度是铁磁性的。
英文摘要：
The microstructural, optical, and magnetic properties and room-temperature photoluminescence （PL） ofMn-doped ZnO thin films were studied. The chemical compositions were examined by energy dispersive X-ray spectroscopy （EDS） and the charge state of Mn ions in the ZnO：Mn films was characterized by X-ray photoelectronic spectrometry （XPS）. From the X-ray diffraction （XRD） data of the samples, it can be found that Mn doping does not change the orientation of ZnO thin films. All the films prepared have a wurtzite structure and grow mainly along the c-axis orientation. The grain size and the residual stress were calculated from the XRD results. The optical transmittance of the film decreases with the increase of manganese content in ZnO. The room-temperature photoluminescence of the films shows that the in- tensity of near band energy （NBE） emission depends strongly on the Mn content. The hysteresis behavior indicates that the films with the Mn content below 9at% are ferromagnetic at room temperature.
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