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中文摘要：
蓝宝石（α-Al2O3）晶体因其具有硬度高、熔点高等优良特性而在国防、航空航天、工业以及生活领域都得到广泛应用,蓝宝石晶片加工质量对其应用有着重要的影响。文章总结了蓝宝石晶片加工表面损伤常用的检测方法,并比较分析了这些检测方法的优缺点,提出了适用于加工需要的蓝宝石晶片表面损伤快速检测方案。
英文摘要：
Sapphire crystal is used extensively for national defense,industry,the field of life and so on because of its excellent characters such as high hardness and melting point.The Grinded sapphire substrate quality has important influence on its application.In this paper,the usually methods of surface damage inspection for grinded sapphire substrate are introduced.Their advantages and disadvantages are also compared and analyzed.Then the rapid detection projects which are suitable for sapphire surface damage are put forward.
同期刊论文项目
同项目期刊论文
Research on the Correlation between the Surface Quality and the Abrasive Grains Wear in Dual-Lapping
Observation in the Surface Roughness of Silicon Wafer during Semi-Fixed Abrasive Machining with Larg
Study on the Mechanical Properties of Sapphire by Numerical Simulation and Nanoindentation Technolog
Surface Lapping by Semi-Bonded Abrasive Grinding Plate for Copper Substrates of Amorphous Ni-Pd-P Al
Research on Mechanism of Chemical Mechanical Polishing Process for licon Nitride Balls with CeO2 Abr
Particle Flow Simulation on the Influences of Property Parameters of Semi-Fixed Abrasive Plate on it
Application of Taguchi Method for Optimization of Finishing Conditions in SUS440 Stainless Steel Sub
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