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Quantitative study of the evolution of oxygen and vacancy complexes in czochralski silicon
  • ISSN号：1882-0778
  • 期刊名称：Applied Physics Express
  • 时间：0
  • 页码：021302-
  • 相关项目：大直径直拉硅单晶缺陷工程的基础研究
作者： Yu, Xuegong1|Chen, Lin1|Chen, Peng1|Yang, Deren1|
同期刊论文项目
大直径直拉硅单晶缺陷工程的基础研究
期刊论文 78 会议论文 10 专利 8
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