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铜沉淀对直拉硅单晶中洁净区形成的影响
  • ISSN号：1000-3290
  • 期刊名称：物理学报
  • 时间：0
  • 页码：310-317
  • 分类：TQ460.8[化学工程—制药化工]
  • 作者机构：[1]厦门大学材料学院,厦门361005, [2]浙江大学硅材料国家重点实验室,杭州310027, [3]福建省防火阻燃材料重点实验室,厦门361005
  • 相关基金：国家自然科学基金（批准号：50902116;50832006）; 福建省高等学校新世纪优秀人才支持计划,硅材料国家重点实验室开放基金项目（批准号：SKL2009-11）; 福建省重大平台建设基金（批准号：2009J1009）资助的课题~~
  • 相关项目：晶体硅中过渡族金属沉淀的微结构研究
作者： 王永志|徐进|王娜婷|吉川|张光超|Wang Yong-Zhi~(1)Xu Jin~(1)2)3)+) Wang Na-Ting~(1)|
关键词： 直拉单晶硅, 铜沉淀, 洁净区, Czchralski silicon, copper precipitation, denuded zone
中文摘要：

研究普通热处理和快速热处理工艺下直拉单晶硅中过渡族金属铜杂质对洁净区生成的影响.通过腐蚀和光学显微镜研究发现,常规高一低.高三步洁净区生成热处理样品中,第一步高温热处理前对样品铜沾污,样品中没有洁净区生成,高密度的铜沉淀布满了样品整个截面.而第二步、第三步热处理过程中引入铜杂质不影响洁净区的生成.研究表明,高温热处理过程中生成的铜沉淀不能溶解是导致洁净区不能形成的最主要原因.另外,由于不同温度下热处理,导致引入铜杂质的平衡浓度不同,会在一定程度上影响洁净区的厚度.对于快速热处理样品,可以得到相似的结果.

英文摘要：

The influence of copper precipitation on the formation of denuded zone（DZ） in Czochralski silicon has been systematically investigated by means of optical microscopy.It was found that,for conventional furnace high-low-high annealing,the copper precipitates colonies generated along the whole crosssection in the specimens contaminated by copper impurity at the first step of the heat treatment, thus no DZ generated.While in other specimens,DZ formed.Additionally,it was found that the contamination temperature can influence significantly the thermodynamics and kinetic process of the formation of copper precipitates.The phenomena also occurred in the specimens underwent rapid thermal-low-high annealing.On the basis of the step by step investigation,it was revealed that the copper precipitates temperature and point defects type can influence the formation of DZ to a great extent.

同期刊论文项目
大直径直拉硅单晶缺陷工程的基础研究
期刊论文 78 会议论文 10 专利 8
晶体硅中过渡族金属沉淀的微结构研究
期刊论文 7 专利 2
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期刊信息
  • 《物理学报》
  • 北大核心期刊（2011版）
  • 主管单位:中国科学院
  • 主办单位:中国物理学会 中国科学院物理研究所
  • 主编：欧阳钟灿
  • 地址：北京603信箱(中国科学院物理研究所)
  • 邮编：100190
  • 邮箱：apsoffice@iphy.ac.cn
  • 电话：010-82649026
  • 国际标准刊号：ISSN：1000-3290
  • 国内统一刊号：ISSN：11-1958/O4
  • 邮发代号:2-425
  • 获奖情况:
  • 1999年首届国家期刊奖,2000年中科院优秀期刊特等奖,2001年科技期刊最高方阵队双高期刊居中国期刊第12位
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  • 被引量:49876