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Modulation of atomic-layer-deposited Al2O3 film passivation of silicon surface by rapid thermal proc
  • ISSN号：0003-6951
  • 期刊名称：Applied Physics Letters
  • 时间：0
  • 页码：052103-
  • 相关项目：大直径直拉硅单晶缺陷工程的基础研究
作者： Lei, Dong|Yu, Xuegong|Song, Lihui|Gu, Xin|Li, Genhu|Yang, Deren|
同期刊论文项目
大直径直拉硅单晶缺陷工程的基础研究
期刊论文 78 会议论文 10 专利 8
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