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Flow pattern defects in germanium-doped Czochralski silicon crystals
  • ISSN号：0947-8396
  • 期刊名称：Applied Physics A: Materials Science and Processin
  • 时间：0
  • 页码：349-355
  • 相关项目：大直径直拉硅单晶缺陷工程的基础研究
作者： Xu, Wubing|Chen, Jiahe|Ma, Xiangyang|Yang, Deren|Gong, Longfei|Tian, Daxi|
同期刊论文项目
大直径直拉硅单晶缺陷工程的基础研究
期刊论文 78 会议论文 10 专利 8
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