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中文摘要：
采用自组装单层膜（self-assembled monolayers,SAMs）技术在玻璃基板表面制备了十八烷基三氯硅烷（octadecyltrichlorosilane,OTS）-SAMs,将OTS-SAMs基体在光掩膜覆盖下用紫外光进行刻蚀,得到含有亲水性和疏水性区域的模板,利用液相沉积法在OTS-SAMs模板表面制备了铁酸铋（BiFeO3）图案化薄膜。通过接触角仪、原子力显微镜、X射线衍射、扫描电镜、X射线能谱仪等测试手段对OTS膜和BiFeO3薄膜进行表征。结果表明：以OTS为模板利用液相沉积法制备出边缘轮廓清晰、粗糙度较小,与基板结合力较强,条纹宽度为10～20μm的BiFeO3图案化薄膜。
英文摘要：
Octadecyltrichlorosilane （OTS） monolayer on the hydroxylated glass substrate was prepared by self-assembled monolayer （SAMs） technique.The OTS-SAMs matrix on the glass substrate was exposed to the ultraviolet light through a photomask to form a pattern of hydrophilic and hydrophobic surfaces.The BiFeO3 pattern films were successfully prepared using the OTS-SAMs model with the pattern of hydrophilic and hydrophobic surfaces.The crystal phase composition,microstructure and topography of the BiFeO3 films were characterized by various techniques,including contact angle tester,atomic force microscopy,X-ray diffraction,scanning electron microscopy and energy disperse spectroscopy.The results indicate the BiFeO3 pattern films have distinct patterns,small line edge roughness,good adherence,and the deposited lines with a width of 10-20 μm.
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