利用自组装单层膜技术,以三氯十八烷基硅烷(OTS)为模板,以硝酸铋和硝酸铁为原料,柠檬酸为络合剂,在玻璃基片上制备了铁酸铋晶态薄膜.探讨了薄膜的煅烧温度和沉积温度对BiFeO3薄膜的影响.通过X射线衍射(XRD)、扫描电镜(SEM)及原子力显微镜(AFM)测试手段对BiFeO3薄膜的物相组成、显微结构和表面形貌进行了表征,EDS能谱测试为铁酸铋薄膜的化学组成提供了有力的证据.结果表明:利用自组装技术在600℃热处理后成功制备出了纯净的BiFeO3晶态薄膜,当沉积温度为70~80℃时铁酸铋薄膜结晶良好,样品表面均匀、致密.
Using OTS as the template,Bi(NO3)3 and Fe(NO3)3 as the raw material and citric acid as the complexing agent,BiFeO3 crystalline film was prepared on the glass substrate by the self-assembled monolayer technique.Effects of calcination and deposition temperatures on the BiFeO3 film were explored.The physical phase composition,the microstructure and surface morphology of BiFeO3 film were characterized by the testing methods,such as XRD,SEM and AFM.The energy detecting spectrum(EDS) provided the supporting evidence for the chemical composition of BiFeO3 film.The results show that the pure BiFeO3 crystalline film is prepared by the self-assembled monolayer technique after calcined at 600℃.In the deposition temperature range from 70℃ to 80℃,the BiFeO3 film has better crystallinity with the homogeneous and dense surface.