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中文摘要：
利用高分辨透射电子显微镜和原子力显微镜观察了含SiOz纳米颗粒溶液冲蚀硅片的表面损伤，考察了纳米颗粒碰撞单晶硅片所导致的微观物理损伤。结果表明，硅片经历一定时间冲蚀后，表面可见纳米尺度的凹坑和划痕，并发现一定厚度的非晶损伤层。抛光液粘度从1.2mPa·s增加到16mPa·sN，冲蚀后硅片表面损伤逐渐变得轻微，对应的表面凹坑最大深度从4nm减小到0．5nm，表面损伤层厚度从约12nm减小到4nm。
英文摘要：
An experiment on cylindricalliquid jet containing de- ionized water and SiO2 nanoparticles impacting obliquely on a single crystal silicon surface at a speed of 50 m/s was performed. The microstructure of the impacted silicon surface was examined through a high resolution transmission electron microscopy and an atomic force microscopy. Experimental results show that craters and scratches in the nano-scale can be found in the surface and an amorphous damage layer occurs after the impact. When the viscosity of slurry increases from 1.2 m Pa · s to 16 m Pa · s, with the exposure time of 30 minutes, the maximum crater depth changes from 4 nm to 0.5nm and the damage layer becomes thinner.
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