中文摘要：

采用溶胶-凝胶法在Pt/Ti/SiO2/Si基片上,制备了Pt/Pb（Zr,Ti）O3（PZT）/Pt和SrRuO3（SRO）/PZT/SrRuO3（SRO）异质结电容器,并研究了快速退火条件下SRO导电层对PZT结构和性能的影响。XRD测试表明,两种结构电容器中的PZT薄膜均为钙钛矿结构,SRO/PZT/SRO、Pt/PZT/Pt均具有较好的铁电性和脉宽依赖性,5V电压下两电容器的剩余极化强度Pr和矫顽电压Vc分别为28.3μC/cm2、1.2V和17.4μC/cm2、2.1V。在经过1010次翻转后,SRO/PZT/SRO铁电电容器疲劳特性相对于Pt/PZT/Pt电容器有了较大的改善,但SRO导电层的引入也带来了漏电流增大的问题。

英文摘要：

Ferroelectric Pb（Zr,Ti）O3 （PZT） heterostructures were fabricated on Pt/Ti/SiO2/Si substrates by Sol-gel method with or without SrRuO3（SRO） conductive layer.Influences of SRO conductive layer prepared by rapid thermal annealing on the structure and physical properties of PZT films were studied by X-ray diffraction （XRD） and ferroelectric tester （Precision LC unit）.X-ray diffractions show that the PZT thin films with or without SRO conductive layer are perovskite structure.Pr and Vc of SRO/PZT/SRO and Pt/PZT/Pt capacitors,measured at 5 V,are 28.3 μC/cm2,1.2 V and 17.4 μC/cm2,2.1 V,respectively.Both of the two kinds of PZT capacitors have shown good pulse width-dependent properties.The fatigue behavior of SRO/PZT/SRO heterostructure is improved while the Pt/PZT/Pt heterostructure fatigues seriously up to 1010 switching cycles.But the leakage current increases because of the introduction of the SRO conductive layer.