中文摘要：

采用溶胶-凝胶方法在玻璃基ITO电极上制备了Pt/Pb（Zr0.4Ti0.6）O3（PZT）/ITO电容器.采用X射线衍射仪、铁电测试仪、分光光度计对其微观结构、电学性能及光学性能进行了测量.结果表明PZT薄膜结晶良好,具有（101）高度择优取向.铁电电容器具有良好的保持特性和抗疲劳特性,具有较大的剩余极化强度和电阻率,5V电压下的剩余极化强度和电阻率分别为41.7μC/cm2和2.5×109Ω.cm;漏电流测量结果表明电压小于0.8V时为欧姆导电机制,当电压大于0.8V时,漏电流满足肖特基发射机制.光学透射谱结果表明在短波范围内,PZT表现出强吸收作用;在长波范围内,PZT表现为强透射,最大透射率达到95%.

英文摘要：

Pt/Pb（Zr0.4Ti0.6）O3（PZT）/ITO capacitors were fabricated on glass substrate,where PZT film was prepared by sol-gel method.The structural and physical properties of Pt/PZT/ITO capacitors were investigated.The microstructural,electrical and optical properties of Pt/PZT/ITO capacitors were characterized by X-ray diffraction（XRD）,ferroelectric tester,UV-spectrophotometer,respectively.It is found that PZT is highly（101） oriented and well crystallized.Ferroelectric measurements indicate that Pt/PZT/ITO capacitor,measured at 5V,possesses good ferroelectric properties,such as fatigue-free characteristics,retention characteristics,large remnant polarization（41.7μC/cm2） and high resistivity（2.5×109Ω·cm）.The analysis of the leakage current mechanism indicates that Pt/PZT/ITO capacitor showes Ohmic-like behaviour at low voltages（0.8V） and Schottky emission at high voltages（0.8V）.From the optical measurement,stronger absorption in shortwave and stronger transmission in longwave range are observed.The maximum value of transmission reaches 95%.