采用磁控溅射法和脉冲激光沉积法,在SrTiO3(001)衬底上制备了La0.5Sr0.5CoO3(70 nm)/Pb(Zr0.4Ti0.6)O3(70 nm)/La0.5Sr0.5CoO3(70 nm)(LSCO/PZT/LSCO)铁电电容器异质结。X射线衍射结果表明:LSCO和PZT薄膜均为外延结构。在5 V的外加电压下,LSCO/PZT/LSCO电容器具有较低的矫顽电压(0.49 V),较高的剩余极化强度(41.7μC/cm^2)和较低的漏电流密度(1.97×10^-5A/cm^2),LSCO/PZT/LSCO电容器的最大介电常数为1073。漏电流的分析表明:当外加电压小于0.6 V时,电容器满足欧姆导电机制;当外加电压大于0.6 V时,符合空间电荷限制电流(SCLC)导电机制。
La0.5Sr0.5CoO3(70 nm)/Pb(Zr0.4Ti0.6)O3(70 nm)/La0.5Sr0.5CoO3(70 nm)(LSCO/PZT/LSCO) capacitor was fabricated on SrTiO3(001) substrate by RF magnetron sputtering and pulsed laser deposition(PLD) method.X-ray diffraction(XRD) shows that both LSCO and PZT thin films are epitaxial structures.It is found that the coercive voltage,remnant polarization,leakage current density and the maximum dielectric constant of LSCO/PZT/LSCO capacitor measured at the voltage of 5 V are 0.49 V,41.7 μC/cm^2,1.97×10^-5 A/cm^2,1073,respectively.Leakage current density of the LSCO/PZT/LSCO capacitor is further investigated,which meets ohmic behavior at lower voltage(〈0.6 V) and agrees well with the space-charge-limited current(SCLC) theory at higher voltage(〉0.6 V).