本文以c向蓝宝石单晶为对象采用纳米压痕方法测试了不同载荷下蓝宝石单晶的硬度与杨氏模量。分析表明,当载荷P=25±2mN时出现了第一次位移突变现象,且位移突变量与最大压入载荷无关;试样的硬度与杨氏模量值随着压入深度的增大而减小,呈现出明显的压痕尺度效应;利用Nix-Gao尺度效应模型对测试数据进行了拟合,最终得出试样的硬度值与杨氏模量为30.956GPa与382.316GPa,与前人分析结果符合程度较高,证明Nix-Gao模型适用于蓝宝石单晶纳米压痕测试尺度效应的模拟与分析。
In this paper, hardness and Young modulus of c plane of sapphire single crystal were characterized by nano-indentation test. The results indicated that the first pop-in event occurred when load 25± 2 mN and the displacement extension had no concern with the maximum load Pmax ; the hardness and Young modulus displayed strong indentation size effect(ISE) which meant that the value of hardness and Young modulus decreased as the indentation depth increasing; Nix-Gao model was used to fit the experimental data and final result showed that the hardness and Young modulus equaled 30. 956 GPa and 382. 316 GPa which was in good agreement with previous works. Therefore, we indicated that the Nix- Gao model was applicable to the analysis of indentation size effect on sapphire single crystal.