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中文摘要：
low—k材料的使用，使低下压力技术成为化学机械抛光（CMP）设备研发设计必须面临的关键技术之一，为适应该需求，提出了弹性组合元件加压技术，即通过改变加压元件的变形量来实现压力调整的机械调压技术。对该加压模式的设计要求及加压精度进行了理论分析，并进行了加压精度及压力一变形线性关系的实验验证。实验所得的加压精度与理论分析结果比较接近，加压装置的压力与变形之间基本呈线性关系。加压元件可以实现压力从零开始的低下压力、高精度压力调整。
英文摘要：
With the use of low--k material, low down--force CMP has been a crucial technology for the equipment design. The technology of elastic compound elements was promoted to meet the needs of the low down--force. The assembly of the elastic element applied down--force in mechanical model. And down--force on the wafer was controlled by deformation of the pressure element. Re- quirements and the accuracy of pressure element were analyzed in theory, and the experimental results tallies basically with it. Also the down--force was in linear to the deformation of it. The pressure ele- ment can be regulated from zero in high precision under the low down force.
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