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The Two Density Peaks in Low Magnetic FieldHelicon Plasma
  • ISSN号：1070-664X
  • 期刊名称：Physics of Plasmas
  • 时间：2015
  • 页码：093507-
  • 相关项目：磁场辅助等离子体增强原子层沉积技术中的物理问题研究
作者： Y. Wang, G. Zhao, Z. W. Liu, J. T. Ouyang, Q. Chen|
同期刊论文项目
磁场辅助等离子体增强原子层沉积技术中的物理问题研究
期刊论文 45 会议论文 24
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