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Numerical Simulation of the Sustaining Discharge in Radio Frequency Hollow Cathode Discharge in Argo
  • ISSN号：1070-664X
  • 期刊名称：Phys. of Plasmas
  • 时间：2014.6.7
  • 页码：033508-033509
  • 相关项目：磁场辅助等离子体增强原子层沉积技术中的物理问题研究
作者： Jiang X X, He F, Chen Q, Ge T, J T Ouyang|
同期刊论文项目
磁场辅助等离子体增强原子层沉积技术中的物理问题研究
期刊论文 45 会议论文 24
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