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Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer dep
  • ISSN号：0734-2101
  • 期刊名称：Journal of Vacuum Science and Technology A
  • 时间：2013.2
  • 页码：114-1-114-7
  • 相关项目：磁场辅助等离子体增强原子层沉积技术中的物理问题研究
作者： Lei, Wenwen|Chen, Qiang|
同期刊论文项目
磁场辅助等离子体增强原子层沉积技术中的物理问题研究
期刊论文 45 会议论文 24
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