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The Evolution of Discharge Mode Transition in HeliconPlasma through ICCD Images
  • ISSN号：0093-3813
  • 期刊名称：IEEE Transactions on Plasma Science
  • 时间：2015
  • 页码：3702-3706
  • 相关项目：磁场辅助等离子体增强原子层沉积技术中的物理问题研究
作者： Chao Ma, Gao Zhao, Yu Wang, Zhongwei Liu, Lijun Sang, Chen Qi|
同期刊论文项目
磁场辅助等离子体增强原子层沉积技术中的物理问题研究
期刊论文 45 会议论文 24
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