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螺旋波等离子体的发射光谱研究
  • 期刊名称：北京印刷学院校报
  • 时间：2014.5.14
  • 页码：75-77
  • 相关项目：磁场辅助等离子体增强原子层沉积技术中的物理问题研究
作者： 赵高，马超，刘忠伟，陈强|
同期刊论文项目
磁场辅助等离子体增强原子层沉积技术中的物理问题研究
期刊论文 45 会议论文 24
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